硅微加速度传感器的对称梁岛结构设计

Design of Symmetric Beam-Mass Structure in Micro Silicon Acceleration Sensor

摘要:

采用有限元方法，针对硅微加速度传感器的对称梁岛结构进行了力学特性分析，通过分析得出了该结构的尺寸对其位移量、谐振频率及模态振型的影响规律，为此类加速度传感器的设计提供参考。

Abstract:

Finite element method (FEM) is applied to analyze the structure of symmetric beam-proof mass of micro silicon acceleration sensor in static field as well as dynamic filed. The regular effect patterns of the structures dimensions on its displacement, reson