电磁微电机的设计与制造技术

Design, Fabrication and Applications of Electromagnetic Micromotor

摘要:

介绍了上海交通大学电磁微电机的研究、设计、制造技术及应用现状。

Abstract:

Research and development achievements on electromagnetic micromotor by Shanghai Jiao Tong University are summarized in the paper, including its structural design, electrical control and microfabrication techniques.