低激励电压微波MEMS开关的理论分析和仿真

Theoretical Analysis and Simulation on a Low Voltage Actuated Microwave MEMS Switch

摘要:

通过对独特的MEMS微波开关模型的理论分析,并用ConventorWare和ADS软件对其微机械结构和射频性能进行仿真,得出该开关工作在DC-4GHz时,插入损耗<1dB,在2GHz的隔离度>40dB,激励电压<5V。可知这种独特的MEMS微波开关模型利用扭转臂和杠杆的原理来达到比较低的激励电压,并且获得较高的隔离度。

Abstract:

In this paper,An unique model of MEMS microwave switch has been analyzed and simulated using ConventorWare and ADS(Advanced Design System),which utilizes torsion spring and leverage for low voltage and good isolation.The switch operates in frequencies fro