微机械梳状陀螺仪的瞬态分析

Transient Analysis of a Micro Gyroscope

摘要:

为了研究微陀螺敏感模态和驱动模态的固有频率与机械灵敏度以及相位漂移、稳定性的关系，利用敏感电压的负刚度效应调节两模态间的固有频率差，通过CovcntorWare软件进行瞬态分析，经优化仿真后得到了在一定的频率差下微陀螺的最佳性能。

Abstract:

The relationship among the sense and drive resonant frequencies and the mechanical sensitivity,stability,phase shift is studied through utilizing the electrostatic negative spring of sensing voltage to adjust the frequency in this paper.The optimal perfor