用SOI技术提高CMOS SRAM的抗单粒子翻转能力

Improve SRAM SEU resistance with SOI CMOS technology

摘要:

提高静态随机存储器(SRAM)的抗单粒子能力是当前电子元器件抗辐射加固领域的研究重点之一。体硅CMOS SRAM不作电路设计加固则难以达到较好抗单粒子能力，作电路设计加固则要在芯片面积和功耗方面做出很大牺牲。为了研究绝缘体上硅(SOI)基SRAM芯片的抗单粒子翻转能力，突破了SOI CMOS加固工艺和128 kb SRAM电路设计等关键技术，研制成功国产128 kb SOI SRAM芯片。对电路样品的抗单粒子摸底实验表明，其抗单粒子翻转线性传输能量阈值大于61.8 MeV/ (mg/cm2)，优于未做加固

关键词:绝缘体上硅;静态随机存储器;抗单粒子翻转;设计加固

Abstract:

Improving Single Event Upset(SEU) resistance of Static Random Access Memory(SRAM) is being a hotspot in the research area of electronics Radiation-Hardening. It is hard to improve the anti-SEU ability of bulk CMOS SRAMs without circuit Radiation-Hardening，whereas more area and power consumption will be spent with Radiation-Harding design. To investigate the SEU resistance of Silicon on Insulator(SOI) SRAMs，this study introduced the key technology breakthrough in SOI CMOS Radiation- Hardening process and 128 kb SRAM circuit design. The SEU experiment of a homemade 128 kb SOI SRAM showed that its threshold Linear Energy Transfer(LET) value was more than 61.8 MeV/(mg/cm2)，which was higher than that of CMOS SRAMs without Radiation-Hardening design. It is concluded that SOI fabrication process is promising to obtain preferable SEU resistance of SRAMs with proper considerations on basic device and 6-T cell structure.

Key words:Silicon on Insulator;Static Random Access Memory;anti-Single Event Upset;Radiation- Hardening by design