光路自动准直中腔镜及反射镜控制算法

Control arithmetic for cavity mirror and reflector in beams automatic alignment system

摘要:

激光装置光路准直系统通过多块腔镜及反射镜的角度调整，使光路的指向和位置达到物理指标要求。为提高远近场光路准直的效率，减少电机调整次数，提出一套准直算法，腔镜准直使用正圆调整算法，反射镜准直将关联系数矩阵由传统的2维改进为4维。通过准直光学实验平台，验证了该算法收敛速度快，电机调整步数更精确，移动次数更少，小于3次就满足准直精密度要求。

Abstract:

In beams automatic alignment system，by adjusting the angles of many cavity mirrors and reflectors of laser equipment，the direction and position of beam can meet to the physical criterions. To increase the collimation efficiency of far and near field and reduce the adjustment times for motor，this study proposed a collimation arithmetic. Adjustment arithmetic of round image was implemented in the collimation of cavity mirror. In the collimation of reflector，correlative coefficient matrix was improved from traditional two dimensions to four. By the alignment experiment platform，the arithmetic was proved to be converged rapidly. The adjustment steps of motor were more accurate，and the times of move were less than three，which could meet the collimation precision requirement.