MEMS永磁振动发电机的设计、制作和测试

Design，fabrication and performance test of a micromachined permanent magnet vibration-based power generator

摘要:

提出了一种基于微电子机械系统技术的微型永磁振动发电机。该发电机能够采集自然界中存在的机械振动能并转换成电能。它主要包括1个固定的双层铜线圈和1个由永磁体和硅基平面弹簧构成的拾振系统。采用体硅微加工和微电镀技术制作硅基平面弹簧和微线圈。组装成功的样机A和样机B的区别在于线圈的尺寸不同。样机B中线圈面积为样机A中线圈面积的28?。测试表明，样机A和B的固有频率分别为222 Hz和247 Hz。在加速度为1 g的振动激励下，样机A在共振状态下产生的最大感应电压和最大负载功率分别为51 mV和5.89 μW。但是

Abstract:

This paper presents a permanent magnet vibration-based power generator based on Micro Electro Mechanical Systems(MEMS) technology. It can scavenge vibration energy and convert it into electrical power. It includes a fixed micro coil and a movable permanent magnet attached on a nickel planar spring integrated with silicon frame. The two-layer copper micro coil and nickel planar spring on silicon are fabricated using bulk-silicon micromachining and microelectroplating technique. Two prototypes with different coils and same magnet-spring system are assembled and tested. Prototype A can generate maximal load voltage of 51 mV and load power of 5.89 μW at 222 Hz resonant frequency and 9.8 m/s2 acceleration. At the resonant frequency of 247 Hz，prototype B generates maximum load voltage of 62 mV and load power of 6.4 μW for acceleration of 9.8 m/s2. The coil’s area of 6.25 mm2 in prototype B is only 28? of that of 22.56 mm2 in prototype A，however，the load voltage and load power are increased by 21.6? and 8.6?，respectively. The analysis about the difference of output performance of two prototypes is also given in this paper.