A 0.67 THz imaging radar is designed and constructed by using Frequency Modulated Continuous Wave(FMCW) technique. The peak output power of the transmitting signal is about 1.2 mW with a bandwidth of 0.66 THz-0.688 8 THz, which is attained by using a×24 frequency multiplication chain fed by a Ka-band 27.5 GHz-28.7 GHz linear frequency-modulated input source with 2 W driving power. After reflecting, the received signal is de-chirped by a×12 multiplier chain pumping Subharmonic Receiver Mixer(SHM) to get a 2.4 GHz IF signal. With an operating bandwidth of 28.8 GHz, the range resolution of terahertz radar is about 1.3 cm after calibration procedure compensating for signal distortion from radar waveform nonlinearities. Experiment results demonstrate the high resolution imaging ability of terahertz radar.