340 GHz太赫兹返波振荡器

340 GHz Terahertz Backward Wave Oscillators

摘要:

介绍太赫兹返波振荡器的发展，重点对340 GHz返波振荡器的设计、模拟和微细加工等研究工作进行了详细介绍。采用平行流电子枪、均匀永磁聚焦系统和折叠波导慢波结构来实现340 GHz返波振荡器，计算和模拟结果表明，当调谐电压14 kV~16.2 kV，工作电流8 mA时，在337 GHz~347 GHz的频率范围内可得到10 mW输出功率。高频结构加工采用UV LIGA技术，已经加工出高频结构样品，并对真空环境应用做了研究，以保证较小的表面粗糙度，减小高频率情况下的射频损耗。

关键词:太赫兹;真空器件;返波振荡器;微机电系统技术;LIGA技术

Abstract:

The development of Terahertz Backward Wave Oscillator(BWO) is reviewed. The 340 GHz BWO is investigated including the design and simulation of electron gun, focusing system and slow wave structure. The folded waveguide slow wave structure，the parallel electron beam gun and the permanent magnetic system are chosen in the system，and the simulation results show that the operation frequency can be tuned from 337 GHz to 347 GHz with 8 mA beam current and the variation of operation voltage from 14 kV to 16.2 kV，and the maximum output power is 10 mW. The Slow Wave Structure(SWS) is fabricated by UV Lithographie,Galanoformung,Abformung(LIGA)，and the work on the vacuum condition is carried out to ensure the small surface roughness and reduce the transmission loss in the high frequency.

Key words:Terahertz;vacuum devices;Backward Wave Oscillator;Micro-Electro-Mechanical Systems;Lithographie,Galanoformung,Abformung