低阈值连续波工作的2.9 THz量子级联激光器

Fabrication of continuous-wave-work 2.9 THz quantum cascade laser with low threshold

摘要:

为了获得低阈值连续波工作太赫兹源，采用固源分子束外延技术生长了GaAs/AlGaAs束缚态向连续态跃迁的太赫兹量子级联激光器(QCL)有源区，基于半绝缘-等离子体波导工艺制作了太赫兹量子级联激光器。获得了激光器(腔面未镀高反射膜)的发射光谱和相应的输出特性等性能，其中器件在10 K工作温度、350 mA激励电流下的中心频率为2.93 THz，连续波工作模式的阈值电流密度为156 A/cm2，器件的最大光输出功率为7.84 mW，最高工作温度为62 K。

Abstract:

In order to obtain low threshold and continuous-wave-work THz source, a terahertz Quantum Cascade Laser(QCL) based on bound-to-continuum intersubband transition is fabricated with semiconductor-plasma waveguide. Then the QCL properties are systematically studied. The lasing frequency is determined to be 2.93 THz and the device shows a Continuous Wave(CW) output power>7.8 mW, with a threshold current density 156 A/cm2, lasing work temperature up to 62 K.