Abstract:Because terahertz(THz) waves have the characteristics of low energy, strong penetration, and broad bandwidth, terahertz imaging technology has been widely used in many fields such as non-destructive testing, biomedicine, and safety testing. How to improve the resolution of terahertz imaging in practical applications is becoming more and more important. Terahertz near-field imaging technology can break through the diffraction limit and obtain high-quality images with submicron or even nanometer resolution, thus high-resolution THz imaging technologies based on near-field methods have been proposed and further applied. This article first describes the basic principles of terahertz near-field imaging; secondly, summarizes its progresses and enhancement methods; and finally prospect the future of terahertz near-field imaging.