基于缝隙波导工装的金属接触PIM统计行为研究
作者:
作者单位:

1.西安文理学院 信息工程学院,陕西 西安 710065;2.西安交通大学,电子与信息学部微电子学院,陕西 西安 710049;3.西安交通大学,西安市微纳电子与系统集成重点实验室,陕西 西安 710049

作者简介:

张松昌(1983-),男,博士,讲师,主要研究方向为电接触、射频系统可靠性.email:zsoncg@126.com.
赵小龙(1989-),男,博士,副教授,主要研究方向为射频无源器件互调干扰研究和宽禁带半导体核辐射探测器件.
曹 智(1993-),男,在读博士研究生,主要研究方向为微波无源器件的无源互调问题及互调测试.
贺永宁(1971-),女,博士,教授,博士生导师,主要研究方向为微波毫米波新结构器件及其探测系统应用.

通讯作者:

贺永宁 email:yongning@mail.xjtu.edu.cn

基金项目:

西安市科技局三年行动计划资助项目(2021XDJH17)

伦理声明:



Statistical behavior study of metal contact PIM based on slot waveguide separable tooling
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Affiliation:

1.School of Information Engineering,Xi'an University,Xi'an Shaanxi 710065,China;2.aSchool of Microelectronics,Faculty of Electronic and Information Engineering;3.bThe Key Laboratory ofMicro-Nano Electronics and System Integration of Xi'an City,Xi'an Jiaotong University,Xi'an Shaanxi 710049,China

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    摘要:

    提出一种基于缝隙波导的可分离且可同时测量接触电阻和无源互调(PIM)的电接触PIM测试方法,并在此基础上研究了金属接触PIM的统计行为。通过接触样品的表面形貌和成分表征,确定了铝合金和镀银铝合金待测件表面存在的氧化膜是产生PIM的主要原因;在几种不同压强下利用四线法多次重复加载后,测量了接触电阻并获得了其统计规律;利用设计的缝隙波导工装测试了铝合金和镀银铝合金金属接触界面接触电阻、PIM和接触压力之间的关系。实验结果表明,在特定压力下的接触电阻具有统计分布特性,其PIM值也随之具有波动性;随着接触压力的增大,接触电阻与PIM值总体上都呈现下降的趋势,且波动范围随之减小。

    Abstract:

    A method is proposed to measure electrical contact Passive Intermodulation(PIM) based on a slot waveguide, which is separable and can simultaneously measure contact resistance and PIM. On this basis, the statistical behavior of metal contact PIM is investigated. Firstly, it is determined that the existence of oxide film on the surface of Device Under Test(DUT) with aluminum and silver coated aluminum, is the main reason for the producing of PIM, by characterizing the surface topography and analyzing the components. Secondly, the contact resistance(Rc) and its statistical regularities are obtained by repeating loading-unloading at some certain pressure with four-terminal sensing method. Finally, the relationship among contact resistance, PIM and contact pressure of aluminum alloy and silver coated aluminum alloy are measured by special designed slot waveguide measurement system. The experimental results show that, the contact resistance of the contact joint has the statistical characteristic under the certain pressure and its PIM value is also fluctuant. Both the contact resistance and PIM value decrease as the contact pressure increases and their fluctuant ranges decrease.

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引用本文

张松昌,赵小龙,曹智,贺永宁.基于缝隙波导工装的金属接触PIM统计行为研究[J].太赫兹科学与电子信息学报,2023,21(3):278~285

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  • 收稿日期:2022-09-25
  • 最后修改日期:2023-01-07
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  • 在线发布日期: 2023-03-31
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