太赫兹肖特基二极管与变频器件的研究进展

Research progress of terahertz Schottky diodes and frequency conversion devices

摘要:

太赫兹波在电磁波谱中处于独特位置，具有高频率、高带宽和高穿透性等特点，在通信、雷达、成像、传感、安检等领域具有广泛的应用前景。倍频器和混频器等变频器件是固态太赫兹系统的关键组成部分。肖特基二极管具有寄生参数低，工艺简单，易于集成等优点，其工作频率已覆盖了整个太赫兹频段。基于肖特基二极管变频器件具有室温工作、频带宽、电子可调性、相位噪声低和灵敏度高等特点，已成为太赫兹收发链路的主流器件。本文综述了近年来肖特基二极管技术的发展，包括其结构和制备方法。此外，还介绍了基于肖特基二极管的倍频器和混频器现状，并对未来的发展趋势进行了探讨。

Abstract:

Terahertz waves occupy a unique position in the electromagnetic spectrum, characterized by high frequency, high bandwidth, and high penetration, which hold broad application prospects in fields such as communication, radar, imaging, sensing, and security inspection. Frequency converters like frequency multipliers and mixers are key components of solid-state terahertz systems. Schottky diodes boast low parasitic parameters, simple fabrication processes, and ease of integration, with their operating frequencies covering the entire terahertz band. Frequency conversion devices based on Schottky diodes, featuring room-temperature operation, broad bandwidth, electronic tunability, low phase noise, and high sensitivity, have become the mainstream devices in terahertz transceiver links. This article reviews the recent developments in Schottky diode technology, including its structure and fabrication methods. Additionally, it introduces the current state of frequency multipliers and mixers based on Schottky diodes and discusses future development trends.