Theoretical Analysis and Simulation on a Low Voltage Actuated Microwave MEMS Switch
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Abstract:
In this paper,An unique model of MEMS microwave switch has been analyzed and simulated using ConventorWare and ADS(Advanced Design System),which utilizes torsion spring and leverage for low voltage and good isolation.The switch operates in frequencies fro
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谢兴军,单红,苏伟.低激励电压微波MEMS开关的理论分析和仿真[J]. Journal of Terahertz Science and Electronic Information Technology ,2003,1(4):