Transient Analysis of a Micro Gyroscope

Transient Analysis of a Micro Gyroscope
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The relationship among the sense and drive resonant frequencies and the mechanical sensitivity,stability,phase shift is studied through utilizing the electrostatic negative spring of sensing voltage to adjust the frequency in this paper.The optimal perfor

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唐海林,程永生,苏伟.微机械梳状陀螺仪的瞬态分析[J]. Journal of Terahertz Science and Electronic Information Technology ,2004,2(2):

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