Study on the prototype of dual frames decoupled micromechanical gyroscope

Abstract:

This paper presents a decoupled micromechanical gyroscope with dual frames. The robust structure considering fabrication errors is obtained by the use of optimal robustness of design and process compensation. Experimental results show that the quality factor of driving mode is more than 2 000，while the quality factor of sensing mode is more than 800；and the range is 2 400°/s，the sensitivity and linearity of the fabricated gyroscope are 1°/s and less than 0.3% respectively.