Abstract:Terahertz communication with high information transmission rate and large bandwidth capacity is considered as a key technology to achieve 6G communication, which requires efficient, stable and compact terahertz sources and detectors. In order to improve the detection performance, the quasi-optical terahertz detector based on integration of Resonant Tunneling Diode(RTD) and on-chip slot antenna is studied. Aiming at the problems of increased loss and parasitic effects of the circuit at high frequencies, a design criterion that jointly considers impedance match factor and antenna radiation efficiency is proposed, and a RTD detector at a small bias voltage is designed at 0.67 THz. The detection performance is characterized by co-simulating of High Frequency Structure Simulator(HFSS) and Advanced Design System(ADS). The current sensitivity of the detector at 0.67 THz is about 2.349 A/W at the input power of -30 dBm. Compared with the design scheme of maximizing impedance match factor at microwave frequencies, the sensitivity is increased by 28.01%.